Galvanometer XY Sets

Unmatched Flexibility, Speed, Accuracy, and Reliability

Fastest motor speeds in the industry, delivering low drift and long-term stability
Superior precision and accuracy that ensure high-quality scanning output
Extensive range of aperture sizes and mirror coatings
Compact models with small footprint ensure easy integration for small spaces
Broad range of product offerings from high-performance to cost-effective

Products and Performance

Product	62xxH Series Galvanometer XY Sets	83xxK Series Galvanometer XY Sets
Highlights	Compact form factor, thermal efficiency, and long-life bearings provide a reliable, high-performance solution to achieve high-speed scanning in small spaces.	All the benefits of the 62xxH Series with even lower noise and drift for improved stability and resolution.
Wavelength Options	355 nm / 532 nm / 1030 nm - 1080 nm / 9.4 μm - 10.6 μm Broadband Coatings: 350 nm – 12 μm
Maximum Scan Angle	40°
Small Angle Step Response ¹ (Typical)	100 μs - 200 μs
Linearity	99.9% minimum, over 20° 99.5% typical, over 40°
Scale Drift (Maximum)	50 ppm/°C	15 ppm/°C
Zero Drift (Maximum)	15 μrad/°C	5 μrad/°C
Repeatability	8 μrad
Compatible Servo Drivers	Analog Series: 671, 672, 673 Digital Series: DC900, DC2000, DC3000 Plus
XY Galvo Block Outline Drawings	Click here to download XY Galvo Block Outline Drawings
Datasheets	62xxH Series Galvanometer Scanners \| 83xxK Series Galvanometer Scanners
Notes:	All angles are in mechanical degrees, unless otherwise noted. 1. 0.1° step and settled to within 99% of the final position. Requires Cambridge Technology servo board.

Product	62xxH Series Galvanometer XY Sets	83xxK Series Galvanometer XY Sets
Highlights	Efficiently-sized, reliable, cost-effective, and performance-optimized for vector marking.	For precision micromachining and demanding marking applications, the 83xxK offers higher accuracy and resolution.
Wavelength Options	355 nm / 532 nm / 1030 nm - 1080 nm / 9.4 μm - 10.6 μm Broadband Coatings: 350 nm – 12 μm
Maximum Scan Angle	40°
Small Angle Step Response¹ (Typical)	250 μs - 500 μs
Linearity	99.9% minimum, over 20° 99.5% typical, over 40°
Scale Drift (Maximum)	50 ppm/°C	15 ppm/°C
Zero Drift (Maximum)	15 μrad/°C	5 μrad/°C
Repeatability	8 μrad
Compatible Servo Drivers	Analog Series: 671, 673 Digital Series: DC900, DC2000, DC3000 Plus
XY Galvo Block Outline Drawings	Click here to download XY Galvo Block Outline Drawings
Datasheets	62xxH Series Galvanometer Scanners \| 83xxK Series Galvanometer Scanners
Notes:	All angles are in mechanical degrees, unless otherwise noted. 1. 0.1° step and settled to within 99% of the final position. Requires Cambridge Technology servo board.

Product	62xxH Series Galvanometer XY Sets	83xxK Series Galvanometer XY Sets
Highlights	Industry’s leading solution which reliably drives large loads for all general processing applications.	Provides higher stability and increased resolution required by large field applications and precise material processing.
Wavelength Options	355 nm / 532 nm / 1030 nm - 1080 nm / 9.4 μm - 10.6 μm Broadband Coatings: 350 nm – 12 μm
Maximum Scan Angle	40°
Small Angle Step Response¹ (Typical)	1 ms - 5 ms
Linearity	99.9% minimum, over 20° 99.5% typical, over 40°
Scale Drift (Maximum)	50 ppm/°C	15 ppm/°C
Zero Drift (Maximum)	15 μrad/°C	5 μrad/°C
Repeatability	8 μrad
Compatible Servo Drivers	Analog Series: 671, 673 Digital Series: DC900, DC2000, DC3000 Plus
XY Galvo Block Outline Drawings	Click here to download XY Galvo Block Outline Drawings
Datasheets	62xxH Series Galvanometer Scanners \| 83xxK Series Galvanometer Scanners
Notes:	All angles are in mechanical degrees, unless otherwise noted. 1. 0.1° step and settled to within 99% of the final position. Requires Cambridge Technology servo board.

"Customers always have a choice to take their business elsewhere; they choose us. I enjoy the collaboration and the challenge of exceeding their expectations."

Bob Hyman

Sales Representative (USA)

Our popular 62xxH Series of scanners is considered the industry standard for galvanometer-based optical laser scanning. Our advanced solutions are built with proprietary technology that is reliable, robust, and cost-effective for an extensive range of scanning applications.

For applications requiring higher levels of accuracy, our 83xxK Series includes proprietary position detector technology - integrated within the product’s design – which ensures high resolution and long-term stability.